What are different silicon compounds. Explain their characteristics and uses in MEMS device fabrication

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written 6.7 years ago by

teamques10 ★ 70k

modified 3.7 years ago by

sagarkolekar ★ 11k

industrial engineering and management

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written 3.7 years ago by

sagarkolekar ★ 11k

1) Silicon dioxide [ Si $O_2$ ]

2) Silicon nitride [ S$i_3$ $N_4$ ]

3) Silicon carbide [ S i C ]

1) silicon dioxide [ Si $O_2$ ] :

various forms of silicon oxides are widely used in micro machining due to their excellent electrical and thermal …

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