Draw and explain trench capacitor and stacked capacitor structure of DRAM cell.

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written 3.0 years ago by

teamques10 ★ 65k

modified 2.3 years ago by

pedsangini276 • 4.8k

cmos vlsi design

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written 3.0 years ago by

teamques10 ★ 65k

Trench capacitor:

A storage cell that uses a trench capacitor is shown in the figure.

The capacitor is created by using a reactive ion etch (RIE) process to create a deep trench in the silicon. The sides are oxidised to create a glass insulator and then doped polysilicon is used …

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