0
1.1kviews
Give and explain interconnect scaling with its width, length, thickness and capacitances.
1 Answer
| written 4.5 years ago by |
The three geometrical dimensions of an interconnect line that are set in the processing are the width w, the thickness t, and the oxide thickness Tox. Improved lithography allows us to reduce the linewidth to a smaller value
where s>1 is the scaling factor. This is the fundamental …