What is MEMS? What is significant difference between Microelectronics and Microsystem.
MEMS is any system that performs electrical and mechanical functions with components in micrometers is a MEMS.
Micro - Electromechanical systems (MEMS) is the integration of mechanical elements, sensors, actuaters and electronics on a common substrate through the utilization of microfabrication technology.
Microelectronic circuits are inherently solid and compact structures MEMS have hole cavity, chonners, membranes etc.
Microelectronics primarily 2D structures while MEMS have complex 3D structures. This has direct impact on the manufacturing process.
Even though MEMS are based on silicon micro electronics processes needs to be adapted to cater for thicker layer deposition, deeper etching and in introduce special steps to free the mechanical structure.
Many MEMS structures are not based on silicon and can be manufactured in polymer glass, quartz and even metals.
Microelectronic devices transmit electricity for specific electrical function while MEMS devices perform great variety of functions.