Discuss the role of SU8 in MEMS applications.
SU-8 is a type of epoxy polymer is a new UV-Curable moaterial for constructing micro mechanical components such as these in MEMS with high aspect ratio.
This polymer is biocompatible for both in-vtra and in vivo application. It possesses good mechanical properties such as hardness and young's modulus.
SU-8 has other Capabilities such as photosensitivity and transparency to visible light which makes it compatible with micro fabrication processes.
This is promising structural material for producing naves devices used in MEMS and bio related applications such as drug delivery system, bio-diagnostic testing kit, bio-MEMS micro fluidics.
SU-8 is a negative tone photoresist.