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Discuss the role of SU8 in MEMS applications.

Discuss the role of SU8 in MEMS applications.

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  • SU-8 is a type of epoxy polymer is a new UV-Curable moaterial for constructing micro mechanical components such as these in MEMS with high aspect ratio.

  • This polymer is biocompatible for both in-vtra and in vivo application. It possesses good mechanical properties such as hardness and young's modulus.

  • SU-8 has other Capabilities such as photosensitivity and transparency to visible light which makes it compatible with micro fabrication processes.

  • This is promising structural material for producing naves devices used in MEMS and bio related applications such as drug delivery system, bio-diagnostic testing kit, bio-MEMS micro fluidics.

  • SU-8 is a negative tone photoresist.

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