Explain in details application of polymers in MEMS. Why and how to make polymer conductive.

• Polymers are extensively used as structural and functional materials for microdevices.

• Elasticity, optical properties, biocompatibility of polymers are used as structural materials for MEMS.

• Polymers strain gauages and capacitors serve as sensing elements for piezoresistive and capacitive microsensors.

• Electrostatic polymer microactuators from polyamide.

• Polyamide based ferrite magnetic composites are used …