What is MEMS micromachining ? Explain in details fabrication process flow of LIGA. Why electroplating is necessary in LIGA process.

• MEMS micromachining refers to fashioning microscopic mechanical parts out of a silicon substrate or on a silicon substrate. The overall process of obtaining the small structure is called micromachining.

• The term LIGA is an acrorym derived from the German words lithography (lithographie) electroforming (galvan forming) and molding (abforming). This technique …