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Explain difference between positive and negative photo resist.
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Solution:

positive photo resist negative photo resist
Softens on exposure to radiation Hardens on exposure to radiation
Base resin and photo-sensitive material Polymer and photosensitive compound
Minimum feature size $0.5 \mathrm{elm}$ minimum feature size 2 rm
No swelling and hence better resolution Unexpected portions will swell when put in developer …

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