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Explain difference between positive and negative photo resist.
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written 16 months ago by
prajapatijaimin
• 3.1k
|
Solution:
| positive photo resist | negative photo resist |
|---|---|
| Softens on exposure to radiation | Hardens on exposure to radiation |
| Base resin and photo-sensitive material | Polymer and photosensitive compound |
| Minimum feature size $0.5 \mathrm{elm}$ | minimum feature size 2 rm |
| No swelling and hence better resolution | Unexpected portions will swell when put in developer and it limits resolution |
| Low step coverage | High step coverage |
| Eg. PMMA | Eg. S4 8 |
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