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Explain difference between positive and negative photo resist.

written 2.9 years ago by prajapatijaimin • 3.3k

•   modified 2.9 years ago

ic technology

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written 2.9 years ago by prajapatijaimin • 3.3k

Solution:

positive photo resist	negative photo resist
Softens on exposure to radiation	Hardens on exposure to radiation
Base resin and photo-sensitive material	Polymer and photosensitive compound
Minimum feature size $0.5 \mathrm{elm}$	minimum feature size 2 rm
No swelling and hence better resolution	Unexpected portions will swell when put in developer and it limits resolution
Low step coverage	High step coverage
Eg. PMMA	Eg. S4 8

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