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What is LOCOS? Why it is required in the CMOS process? Explain technology solutions for avoiding problems in LOCOS.
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| written 3.0 years ago by |
Solution:
Locos:
Thermal-grown oxide is mainly used as isolation material in semiconductor fabrication. Local Oxidation of Silicon (LoCos) is the traditional isolation technique used for the isolation of neighboring mos transistors.
At first, a very thin silicon dioxide layer is grown on the wafer, the so-called pad oxide.
Then a …